Our linear motor axis transports wafer boxes over a total length of 16 m under cleanroom conditions.
Due to the special customer-side process flow, the requirements in terms of the total length, but also the environmental conditions, were very extensive. In close consultation with the customer, the standard linear axis with linear motor drive was therefore adapted to the customer's requirements. In doing so, we were able to make use of the numerous customisation options we have available that are already predefined and ready for retrieval. According to customer specifications, the limited standard overall length of approx. 5.700 mm was therefore cancelled and extended to a total of 16 m. This allows us to easily transport the wafer boxes from one end of the clean room to the other.
Beyond the standard, uniquely adapted – We offer extended customisation options for our linear axes and linear axis systems. Talk to us!
Requirements:
- Excess length
- Cleanroom compatible
- Dynamic
HIWIN components:
Go directly to the installed HIWIN components here and use the CAD configurator or download the corresponding CAD model:
Fields of application:
